MKS Instruments, Inc.
The Control & Information Technology group is actually comprised of three product groups that were acquired by MKS over the past few years: DIP, Inc. (digital control network products), TeNTA Technology, Ltd. (modular, computer-based process control systems that control semiconductor manufacturing equipment), and IPC Fab Automation GmbH (web-based hardware and software that enable e-diagnostics and APC for advanced manufacturing processes).
Our digital control network products are used in the semiconductor, commercial vehicle, oil and gas and chemical processing industries, and consist of a wide range of established hardware and software solutions based on CAN technology. These products facilitate the communications among digital process sensors, control subsystems and the host computer system. Our modular, computer-based process control systems feature compact size, flexible open architectures, and a real-time, Java?-based embedded control platform to enable manufacturing equipment with web connectivity and e-diagnostics. Our web-based hardware and software solutions provide for more than one interface from the process tool to the factory network, thereby enabling local and remote users to monitor not only tool scheduling but also various parameters of tool operating performance. Our connectivity hardware incorporates intelligent multiplexing software that eliminates communication bottlenecks by enabling and prioritizing user access to multiple tool applications.
Vacuum Products Group
MKS HPS? Products in Boulder, Colorado manufactures a complete range of vacuum components, valves and gauges. Between the process tool and the scrubber, our vacuum products offer solutions to system contamination, system downtime, space constraints and outgassing. HPS components are used in medium to high vacuum systems, downstream from the process chamber, where leak integrity and cleanliness are critical to good process results. Our series of vacuum foreline heaters and traps prevent the build-up of condensable gases that could be deposited near the process chamber and that clog pumping lines. With precise control of the temperature in the vacuum line, condensates are directed to traps that are designed to protect the downstream pumping systems.
To help process equipment and maintenance engineers optimize the productivity of their process tools, MKS combines individual components and instruments into integrated modules to provide specific process functions that require multiple components working together. HPS Integrated Component Subsystems? are tailored for a variety of different applications and can solve specific tool challenges to bring about increased yield, throughput and uptime; from instruments that combine flow measurement and pressure control to complete vacuum foreline subsystems.
HPS vacuum gauges are well known in applications requiring indirect pressure measurement throughout the vacuum range. These compact gauges and transducers utilize Pirani, convection Pirani, piezo, hot cathode, cold cathode and MEMS-based multi-sensor technologies.
HPS Products also offers a line of clamp fittings and buttweld components designed and manufactured for the biotechnology and pharmaceutical processing industries. These components can be used in any liquid flow process or high purity utility application where cleanability, sterility, dimensional integrity, and materials of construction are critical.
Power & Reactive Gas Products Group
MKS in Wilmington, Massachusetts manufactures innovative solutions for plasma, power, and reactive gases. In 2001, MKS acquired ASTeX, Applied Science & Technology, who was a world leader in innovative solutions for plasma, power, reactive gases and process systems. Now a part of the MKS Power & Reactive Gas Products Group, the ASTeX? extensive product portfolio includes remote plasma sources and subsystems such as the ASTRON? Remote Plasma Source; the Semozon? and Liquozon? Ozone generators for CVD and advanced cleaning applications; and microwave plasma sources and subsystems. Products are sold as individual components or as complete, integrated turnkey systems that meet stringent customer requirements.
In 2002, MKS acquired the ENI division of Emerson Electric, a leading supplier of solid-state radio frequency (RF) and direct current (DC) plasma power supplies, matching networks and instrumentation for the semiconductor and thin-film processing industries. Located in Rochester, New York, the ENI? branch of the MKS Power & Reactive Gas Products Group manufactures RF power supplies for semiconductor and other thin film processing applications, and DC power supplies for IC, storage media, flat panel display manufacturing, and other coating applications. The ENI product portfolio also includes impedance matching networks and plasma metrology products.
Also a part of the Power & Reactive Gas Products Group, the MKS Medical Electronic Products in Colorado Springs, Colorado manufactures RF amplifiers for the magnetic resonance imaging (MRI) market.
Vacuum Subsystem Design & Manufacturing
MKS Telvac Engineering, located in Telford, England, offers design and manufacturing outsourcing to OEMs in the thin-film, semiconductor and analytical instrument markets. Telvac adds a key capability to MKS' European operations. Given the substantial growth in such fields as optical devices for data transmission and advanced analytical instruments for biotechnology, OEMs are looking to outsource much of their vacuum subsystem design and manufacture.
By providing our OEM customers with turnkey subassemblies, they can focus their valuable engineering time on their own core products' performance and applications. Some of Telvac's vacuum subsystems include UHV stainless steel precision assemblies, stainless steel and aluminum vacuum housings, vacuum chambers, and gas control panels.
MKS Instruments
90 Industrial Way,
Wilmington, Massachusetts 01887
Tel: 800-227-8766 (in the USA),
or 978-284-4000 (worldwide)
Fax: 978-284-4999
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